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NEGATIVE RESIST NR2-8000P

NEGATIVE RESIST NR2-8000P

Detailed

Description
• Negative Resist NR2-8000P is a negative tone photoresist designed for thick filmapplications and is compatible with UV exposure tools emitting at the 365 nm exposurewavelength, including wafer steppers, scanning projection aligners, proximity printersand contact printers.
• The following are the advantages of NR2-8000P over other resists:- superior resolution capability- high photospeed which translates into high exposure throughput- fast develop time- superior adhesion in plating and wet etching- easy resist removal in Resist Remover RR41- shelf life exceeding 1 year at proper storage temperatures.
• The formulation and processing of NR2-8000P were designed with regard tooccupational and environmental safety. The principal solvent in NR2-8000P isgammabutyrolactone and development of NR2-8000P is accomplished in abasic water solution.
 
Properties
♦ Solids content (%) 45-50 45-50
♦ Principal solvent gammabutyrolactone gammabutyrolactone
♦ Appearance light yellow liquid light yellow liquid
♦ Coating characteristic uniform, striation free uniform, striation free
♦ Film thickness:  

NEGATIVE RESIST


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