Mask Aligner

Feature

• MEMS (Bio-MEMS, Optical-MEMS)
• TSP(Touch Screen Panel)
• FPD(Flat Panel Display), RF Microwave
• LED, Opto-electronics

Item

Substrate Size

Resolution

Alignment Accuracy

Wave Length

UV Intensity

UV Beam Uniformity

Contact Mode

Microscope

Manual, PLC, Touch

piece, 4", 6"

1㎛ in vacuum contact with Thin PR@Si Wafer

1 ㎛

365~436nm /I,H,G line

≤max25mW/cm²

±3%~±5%

Vacuum/Hard/Soft

Dual CCD Zoom Microscope

Semi Auto

6”, 8”, 12

≤max20mW/cm²

±3%~±5%

Vacuum/Hard/Soft/Poximity

Dual CCD Zoom Microscope